Acoustic resonator structure comprising a bridge
AssigneeAvago Technologies Wireless IP (Singapore) Pte. Ltd.
InventorsJohn Choy, Chris Feng, Phil Nikkel
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Abstract
An acoustic resonator comprises a first electrode a second electrode and a piezoelectric layer disposed between the first and second electrodes. The acoustic resonator further comprises a reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer. An overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer comprises an active area of the acoustic resonator. The acoustic resonator also comprises a bridge adjacent to a termination of the active area of the acoustic resonator.
Claims20
An acoustic resonator, comprising:
- a first electrode;
- a second electrode;
- a piezoelectric layer disposed between the first and second electrodes;
- a reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer, an overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer defining an active area of the acoustic resonator, wherein the first electrode substantially covers the reflective element, and the piezoelectric layer extends over an edge of the first electrode;
- and
- a bridge adjacent to a termination of the active area of the acoustic resonator, wherein the bridge overlaps a portion of the first electrode.
A film bulk acoustic resonator (FBAR), comprising:
- a first electrode;
- a second electrode;
- a piezoelectric layer disposed between the first and second electrodes;
- a cavity disposed beneath the first electrode, the second electrode and the piezoelectric layer, an overlap of the cavity, the first electrode, the second electrode and the piezoelectric layer defining an active area of the acoustic resonator, wherein the first electrode substantially covers the cavity, and the piezoelectric layer extends over an edge of the first electrode;
- and
- a bridge adjacent to a termination of the active area of the acoustic resonator, wherein the bridge overlaps a portion of the first electrode.
A filter element comprising an acoustic resonator, the acoustic resonator comprising:
- a first electrode;
- a second electrode;
- a piezoelectric layer disposed between the first and second electrodes;
- a reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer, an overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer defining an active area of the acoustic resonator, wherein the first electrode substantially covers the reflective element, and the piezoelectric layer extends over an edge of the first electrode;
- and
- a bridge adjacent to a termination of the active area of the acoustic resonator, wherein the bridge overlaps a portion of the first electrode.
Dependencies are inferred from the claim text.