Ultra-high multiplex analytical systems and methods

A system for measuring molecular events in an array of zero-mode-waveguides comprising:

• a) an array of zero-mode-waveguides disposed on a top surface of a transparent substrate having a top surface and a bottom surface, wherein the transparent substrate comprises an array of micromirrors that redirect light to the zero-mode-waveguides, wherein each micromirror comprises a feature having a top and sides, wherein the tops and sides of the features each comprise a reflective coating;
• and
• b) an illumination system that provides illumination beams to the zero-mode-waveguides through the bottom surface of the transparent substrate;
• wherein the system is configured such that the micromirrors interact with the illumination beams such that the illumination beams undergo constructive interference, whereby the intensity of light at the zero-mode-waveguide is increased relative to other illuminated regions.