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US 8,247,032 B2Granted
Methods utilizing scanning probe microscope tips and products therefor or produced thereby
AssigneeNorthwestern University
InventorsChad A. Mirkin, Richard Piner, Seunghun Hong
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Abstract
The invention provides a lithographic method referred to as “dip pen” nanolithography (DPN). The method include the following steps: (i) providing a substrate and a scanning probe microscope tip; (ii) coating the tip with a patterning compound and a solvent to form a wet tip; and (iii) contacting the coated tip with the substrate so that the compound is applied to the substrate so as to produce a desired pattern. The invention also provides substrates patterned by DPN and kits for performing DPN.
Claims26
A method of nanolithography comprising:
- providing a substrate;
- providing a scanning probe microscope tip;
- coating the tip with a patterning compound and a solvent to form a wet tip;
- and
- contacting the coated tip with the substrate so that the compound is applied to the substrate so as to produce a desired pattern.
2 more elements
Dependencies are inferred from the claim text.