Substrate processing systems and related methods

A system for processing one or more substrates, comprising:

• a. a support for positioning the one or more substrates in a manner to be processed;
• b. a fluid dispensing device positioned in a manner to dispense a fluid onto the one or more substrates;
• c. a valve in fluid communication with the fluid dispensing device;
• d. a first fluid pathway between the valve and the fluid dispensing device;
• e. at least a second fluid pathway and a third fluid pathway, wherein each of the second and third pathways can discharge a fluid from the valve and divert the fluid flow from the first fluid pathway;
• f. a first fluid source comprising a first fluid and in fluid communication with the valve;
• g. a second fluid source comprising a second fluid and in fluid communication with the valve;
• and
• h. a controller operatively coupled to the valve, wherein the controller comprises program instructions comprising:
• i. causing the second fluid to flow through the third fluid pathway;
• ii. after instruction (i), causing the second fluid to flow through the first fluid pathway;
• iii. after instruction (ii), diverting the second fluid flow from the first fluid pathway by causing the second fluid to flow through the third fluid pathway;
• iv. after instruction (iii), causing the first fluid to flow through the second fluid pathway;
• and
• v. after instruction (iv), causing the first fluid to flow through the first fluid pathway.

A system for processing one or more substrates, comprising:

• a. a support for positioning a substrate in a manner to be processed;
• b. a fluid dispensing device positioned in a manner to dispense a fluid onto the one or more substrates;
• c. a valve having at least one fluid entrance and at least two fluid exits, wherein at least one fluid exit is in fluid communication with the fluid dispensing device and at least one fluid exit diverts the fluid flow entering the valve away from the fluid dispensing device;
• d. a first fluid source comprising a first fluid and in fluid communication with a fluid entrance of the valve;
• e. a second fluid source comprising a second fluid and in fluid communication with a fluid entrance of the valve, wherein the first fluid and the second fluid can exit the valve fluid exit that is in fluid communication with the fluid dispensing device;
• and
• f. a controller operatively coupled to the valve, wherein the controller comprises program instructions comprising:
• i. causing the first fluid to flow into a fluid entrance of the valve and flow out of a first fluid exit of the valve that is in fluid communication with the fluid dispensing device;
• ii. after instruction (i), diverting the first fluid flow from the first fluid exit by causing the first fluid to flow out of a second fluid exit of the valve;
• iii. after instruction (ii), causing the second fluid to flow into a fluid entrance of the valve and flow out of a third fluid exit of the valve;
• iv. after instruction (iii), causing the second fluid to flow out of the first fluid exit of the valve;
• v. after instruction (iv), diverting the second fluid flow from the first fluid exit by causing the second fluid to flow out of the third fluid exit of the valve;
• vi. after instruction (v), causing the first fluid to flow out of the second fluid exit of the valve;
• and
• vii. after instruction (vi), causing the first fluid to flow out of the first fluid exit of the valve.