Small electron gun
AssigneeHitachi I High-Technologies Corporation
InventorsSoichi Katagiri, Takashi Ohshima
Life of this patent
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Abstract
To provide a small electron gun capable of keeping a high vacuum pressure used for an electron microscope and an electron-beam drawing apparatus. An electron gun constituted by a nonevaporative getter pump, a heater, a filament, and an electron-source positioning mechanism is provided with an opening for rough exhausting and its automatically opening/closing valve, and means for ionizing and decomposing an inert gas or a compound gas for the nonevaporative getter pump. It is possible to keep a high vacuum pressure of 10−10 Torr without requiring an ion pump by using a small electron gun having a height and a width of approximately 15 cm while emitting electrons from the electron gun.
Claims6
A scanning electron microscope including an electron gun to generate an electron beam, an electronic optical system column holding a sample table and an electronic optical system that directs the electron beam to a sample held by the sample table, and an opening plate arranged at a boundary of the electron gun and the electronic optical system column and having an opening for passing the electron beam therethrough to the electronic optical system, the scanning electron microscope comprising:
- a positioning device attached to the electron gun for adjusting a position of the electron beam with respect to the opening, the positioning device including first and second parallel-leaf springs that are combined in series, each of the first and second parallel-leaf springs including two parallel-plate springs that are fixed to opposing sides of the parallel-leaf spring.
Dependencies are inferred from the claim text.