Surface emission type electron source and drawing device

An electron emission device comprising:

• a surface emission type electron source comprising a first electrode having a planar form, a second electrode having a planar form facing the first electrode, an electron passage layer disposed between the first electrode and the second electrode, and a power source part configured to apply a voltage to the second electrode and the first electrode, and a porous member comprising a plurality of tube members that are bound together, wherein the electron passage layer comprises a plurality of quantum wires extending in a first direction from the first electrode to the second electrode, the quantum wires being spaced apart from each other at predetermined intervals, and electrons are emitted from a front surface of the second electrode;
• a stage having a surface on which a substrate being radiated by the emitted electrons is placed, the stage being disposed so as to face the second electrode of the surface emission type electron source, wherein:
• the quantum wires of the surface emission type electron source are made of silicon, a layer constituted by an insulator or a semiconductor is formed between the second electrode and the electron passage layer of the surface emission type electron source, and protrusions protruding toward leading ends of the quantum wires are formed on a back surface of the second electrode at positions corresponding to the quantum wires,
• each tube member has a first opening at one end and a second opening at another end that is wider than the first opening,
• each tube member has a diameter that monotonously increases from the first opening toward the second opening, and
• the porous member is connected to the front surface of the second electrode such that the first openings are facing the front surface of the second electrode.