US 8,231,098 B2 · Methods and devices for active vibration damping of an optical structure

Abstract

A vibration damper assembly that may be attached and moved about a payload or optical mount surface of an optical structure such as an optical table. The vibration damper assembly may include a sensor and an actuator that may be disposed within a housing. In some embodiments, the vibration damper assembly or components thereof may be incorporated into an optical structure in the form of an optical component to be disposed or mounted on an optical mount surface of an optical structure such as an optical table. Embodiments of the vibration damper system may include a controller in communication with the damper assembly Embodiments of the controller may use adaptive tuning, auto-ranging selection of gain factors and other features in order to optimize damping performance.

Claims10

Dependent claims

An optical table with active vibration damping, comprising:

a payload surface including at least one mounting feature;
and
an active vibration damper system including,
a moveable active vibration damper assembly detachably coupled to the payload surface to allow an operator to detach and move the damper assembly to a different location of the payload surface to optimize the damping function of the assembly, the vibration damper assembly including a vibration sensor and an actuator, the actuator including an active element coupled to a mass and the mass being mechanically coupled by a flexure to the payload surface, and
a controller which is in communication with the vibration sensor and actuator, and which is configured to generate a drive signal to the actuator that is configured to convert the drive signal into vibration motion applied to the payload surface to offset vibration in the payload surface as measured by the vibration sensor.

2 more elements

Dependencies are inferred from the claim text.

Methods and devices for active vibration damping of an optical structure

Life of this patent

Methods and devices for active vibration damping of an optical structure

Life of this patent

Abstract

Claims10