Method for providing a perpendicular magnetic recording (PMR) pole

A method for providing a perpendicular magnetic recording (PMR) pole in a magnetic recording transducer comprising:

• providing an etch stop layer;
• providing an intermediate layer on the etch stop layer, the intermediate layer having a top surface;
• providing a Ta layer on the intermediate layer;
• providing a bottom antireflective coating (BARC) on the Ta layer;
• providing a mask on the BARC, the mask including a photoresist line having at least one side;
• transferring the mask to the BARC, a remaining portion of the BARC residing under the line;
• providing a hard mask on the mask, a first portion of the hard mask residing on the at least one side and a second portion of the hard mask residing on the surface of the intermediate layer, the hard mask including a Ru layer and a Cr layer on the Ru layer;
• ion milling at an angle of at least five and not more than fifteen degrees from a normal to the at least one side, at least part of the first portion of the hard mask being removed and at least a portion of the line being exposed;
• removing the line, thereby providing an aperture in the hard mask corresponding to the line;
• forming a trench in the intermediate layer under the aperture, the trench having a bottom and a top wider than the bottom;
• providing a PMR pole, at least a portion of the PMR pole residing in the trench;
• and
• dry etching a remaining portion of the Ru layer on a yoke portion of the transducer.