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US 8,216,951 B2Granted
Quantum tunneling devices and circuits with lattice-mismatched semiconductor structures
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsZhiyuan Cheng, Calvin Sheen
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Abstract
Structures include a tunneling device disposed over first and second lattice-mismatched semiconductor materials. Process embodiments include forming tunneling devices over lattice-mismatched materials.
Claims13
A method for forming a structure, the method comprising:
- forming an opening above a region of a substrate comprising a first crystalline semiconductor material, the opening being defined by a dielectric sidewall and an exposed surface of the substrate, the opening having a width, the dielectric sidewall having a height equal or greater than a predetermined height, the predetermined height being between half of the width and twice the width;
- forming in the opening a second crystalline semiconductor material lattice-mismatched to the first crystalline semiconductor material, the second crystalline semiconductor material having a thickness at least the predetermined height;
- and
- defining a tunneling device over at least a portion of the second crystalline semiconductor material.
1 more element
A method of forming a transistor structure, the method comprising:
- forming an opening above a surface of a substrate comprising a first crystalline semiconductor material, the opening having a non-crystalline sidewall;
- forming a second crystalline semiconductor material in the opening, the second crystalline semiconductor material being lattice-mismatched to the first crystalline semiconductor material, a majority of defects arising from lattice-mismatch between the first and second semiconductor materials terminating within the opening;
- forming a tunneling structure over and in contact with at least a portion of the second crystalline semiconductor material;
- and
- forming first, second, and third terminals of a transistor proximate the tunneling structure.
2 more elements
Dependencies are inferred from the claim text.