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US 8,211,737 B2Granted
Method of producing nanopatterned articles, and articles produced thereby
AssigneesUniversity of Massachusetts, The Regents of the University of California
InventorsThomas P. Russell, Soojin Park, Ting Xu
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Abstract
A nanopatterned surface is prepared by forming a block copolymer film on a miscut crystalline substrate, annealing the block copolymer film, then reconstructing the surface of the annealed block copolymer film. The method creates a well-ordered array of voids in the block copolymer film that is maintained over a large area. The nanopatterned block copolymer films can be used in a variety of different applications, including the fabrication of high density data storage media.
Claims29
A method of preparing a nanopatterned surface, comprising:
- forming a block copolymer film on an annealed, miscut surface of a crystalline substrate;
- annealing the block copolymer film;
- and
- surface reconstructing the annealed block copolymer film.
1 more element
Dependencies are inferred from the claim text.