Separating method of bonded body
AssigneeSeiko Epson Corporation
InventorsMitsuru Sato, Takatoshi Yamamoto, Shintaro Asuke, Yoshiaki Mori, Kazuhiro Gomi
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AssigneeSeiko Epson Corporation
InventorsMitsuru Sato, Takatoshi Yamamoto, Shintaro Asuke, Yoshiaki Mori, Kazuhiro Gomi
Estimating the term…
A separating method of a bonded body, the bonded body including two base members and a bonding film through which the base members are boded together, enabling to easily and efficiently separating the bonded body into the two original base members is provided. Further, the bonding film contains a silicone material composed of silicone compounds. The separating method includes: preparing the bonded body with the bonding film; and applying energy for separation to the bonding film so that cleavage is generated within the bonding film due to breakage of a part of molecular bonds of the silicone compounds, to thereby separate the bonded body into the first and second base members.
A separating method of a bonded body, the bonded body including a first base member, a second base member and a bonding film through which the first and second base members are bonded together, the bonding film containing a silicone material composed of silicone compounds, the separating method comprising:
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