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US 8,198,715 B2Granted
MEMS device and process
AssigneeWolfson Microelectronics plc
InventorsRichard Ian Laming, Colin Robert Jenkins
Life of this patent
Estimating the term…
Abstract
A MEMS transducer includes a substrate, a membrane layer and a back-plate layer. The membrane layer is supported by the substrate. The back-plate layer is supported by the membrane layer and includes a respective sidewall portion and a respective raised portion. One or more columns, separate from the sidewall portion of the back-plate layer, connect the back-plate layer, the membrane layer and the substrate.
Claims17
A MEMS transducer, comprising:
- a substrate;
- a membrane layer, supported by the substrate;
- a back-plate layer, supported by the membrane layer, said back-plate layer comprising a respective sidewall portion and a respective raised portion;
- and
- one or more columns separate from the respective sidewall portion of the back-plate layer, said columns connecting the back-plate layer, the membrane layer and the substrate.
2 more elements
Dependencies are inferred from the claim text.