Method and device for producing thin silicon rods
AssigneePV Silicon Forschungs und Produktions GmbH
InventorsHelge Riemann, Friedrich-Wilhelm Schulze, Joerg Fischer, Matthias Renner
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Abstract
A method for producing thin silicon rods using a floating zone crystallization process includes supplying high frequency (HF) current to a flat induction coil having a central opening, a plurality of draw openings and a plate with a slot as a current supply of the HF current so as to provide a circumfluent current to the central opening. An upper end of a raw silicon rod is heated by induction using the flat induction coil so as to form a melt pool. A thin silicon rod is drawn upwards through each of the plurality of draw openings in the flat induction coil from the melt pool without drawing a thin silicon rod through the central opening having the circumfluent current.
Claims21
A method for producing thin silicon rods using a floating zone crystallization process, the method comprising:
- supplying high frequency (HF) current to a flat induction coil having a central opening, a plurality of draw openings and a plate with a slot as a current supply of the HF current so as to provide a circumfluent current to the central opening;
- heating an upper end of a raw silicon rod by induction using the flat induction coil so as to form a melt pool;
- and
- drawing a respective thin silicon rod upwards through each of the plurality of draw openings in the flat induction coil from the melt pool without drawing a thin silicon rod through the central opening having the circumfluent current.
A device for producing thin silicon rods using a floating zone crystallization process, the device comprising:
- a flat induction coil having a central opening, a plurality of draw openings and a plate with a slot as a current supply configured to provide a circumfluent high frequency (HF) current to the central opening without providing a ring current to the plurality of draw openings, each of the plurality of draw openings being configured to accommodate a thin silicon rod.
Dependencies are inferred from the claim text.