Glass substrate-holding tool
AssigneeAsahi Glass Company, Limited
InventorJunichi Kageyama
Life of this patent
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Abstract
To provide a glass substrate-holding tool which is capable of avoiding scratching to the deposition surface of a glass substrate and dusting thereby caused as well as scratching and deposition of foreign substances at a center portion of the rear surface of the substrate and which is capable of suppressing dusting from the holding tool itself at the time of forming a multi-layered reflection film and an absorptive layer. A glass substrate-holding tool having, formed on a surface of a flat base, a catching portion for catching and holding by van der Waals forces, wherein the catching portion is in contact with only the periphery of the glass substrate.
Claims24
A glass substrate-holding tool to catch and hold a glass substrate, which comprises a base being flat at least at its surface, and a catching portion provided on at least at a part of the base, wherein:
- the catching portion has a surface structure and flexibility capable of catching the glass substrate by van der Waals forces, when it is brought in contact with the glass substrate, and
- the catching portion satisfies the following (a) and (b):
- (a) when the length of one side of the glass substrate is represented by L (mm), the catching portion is in contact with only the periphery of the glass substrate with a distance of at most 1/5 L from the edge of the glass substrate,
- (b) when the mass of the glass substrate is represented by T (g), the catching force F0 per unit surface area (gf/mm2) of the catching portion and the total contact area S (mm2) of the catching portion to the glass substrate are selected so that the substrate-catching force F (gf) by the catching portion be F=α×T (1≦α≦200).
A glass substrate-holding tool to catch and hold a glass substrate, which comprises a base being flat at least at its surface, and a catching portion provided on at least at a part of the base, wherein:
- the catching portion has a surface structure and flexibility capable of catching the glass substrate by van der Waals forces, when it is brought in contact with the glass substrate, and
- the catching portion satisfies the following (c) to (e):
- (c) when the length of one side of the glass substrate is represented by L (mm), the catching portion is in contact with only the periphery of the glass substrate with a distance of at most 1/5 L from the edge of the glass substrate,
- (d) the catching force F0 per unit surface area of the catching portion is from 0.0225 to 16.5 gf/mm2,
- (e) the total contact area S of the catching portion to the glass substrate is at least 20 mm2.
Dependencies are inferred from the claim text.