Recipe generation system and method

A non-transitory computer-readable medium encoded with a computer program for generating a recipe of a critical dimension SEM off-line using an input file for off-line recipe generation for the critical dimension SEM and design data, the computer program comprising instructions for:

• generating an optimal value for a pictorial imaging condition in each of items included in the input file for off-line recipe generation based on information on a measurement point included in the input file for off-line recipe generation and the design data;
• and
• reflecting the optimal value in the input file for off-line recipe generation and generating an input file having undergone optimal value setting in accordance with an instruction to reflect the optimal value in the input file for off-line recipe generation.

A non-transitory computer-readable medium encoded with a computer program for generating a recipe of a critical dimension SEM off-line using an input file for off-line recipe generation for the critical dimension SEM and design data, the computer program comprising instructions for:

• generating an optimal value for a pictorial imaging condition in each of items included in the input file for off-line recipe generation based on information on a measurement point included in the input file for off-line recipe generation and the design data;
• and
• generating an off-line recipe based on the design data, the optimal value, and the input file for off-line recipe generation in accordance with an instruction to reflect the optimal value in an off-line recipe.

A recipe generation method for generating a recipe of a critical dimension SEM off-line using an input file for off-line recipe generation for the critical dimension SEM and design data, comprising:

• a step of, by an optimal value generation section, generating an optimal value for a pictorial imaging condition in each of items included in the input file for off-line recipe generation based on information on a measurement point included in the input file for off-line recipe generation and the design data;
• and
• a step of, by an optimal value reflection processing section, reflecting the optimal value in the input file for off-line recipe generation and generating an input file having undergone optimal value setting in accordance with an instruction to reflect the optimal value in the input file for off-line recipe generation.

A recipe generation method for generating a recipe of a critical dimension SEM off-line using an input file for off-line recipe generation for the critical dimension SEM and design data, comprising:

• a step of, by an optimal value generation section, generating an optimal value for a pictorial imaging condition in each of items included in the input file for off-line recipe generation based on information on a measurement point included in the input file for off-line recipe generation and the design data;
• and
• a step of, by a recipe generation section, generating an off-line recipe based on the design data, the optimal value, and the input file for off-line recipe generation in accordance with an instruction to reflect the optimal value in an off-line recipe.