Pattern forming materials and pattern formation method using the materials

A method of forming a pattern on a pattern forming material comprising a thermal sensitive material layer, which does not comprise a light-to-heat converting material, and which is interposed between first and second light-to-heat converting layers, the method comprising:

• radiating a light onto the first and the second light-to-heat converting layers to generate heat therein that changes a pattern portion of the thermal sensitive material layer,
• wherein the first and second light-to-heat converting layers consists essentially of Ge—Sb—Te alloys;
• Ag—In—Sb—Te alloys;
• Ag—In—Sb—Te—V alloys;
• lithium niobate;
• methylnitro aniline;
• or any combinations thereof.

A method of forming a pattern using a pattern forming material including a thermal sensitive material layer, which does not comprise a light-to-heat converting material, formed on a target substrate, a first light-to-heat converting layer formed between the thermal sensitive material layer and the target substrate, and a second light-to -heat converting layer formed on a surface of the thermal sensitive material layer opposite to the first light-to-heat converting layer, the thermal sensitive material layer being interposed between the first and second light-to-heat converting layers and the first and second light-to -heat converting layers consists essentially of Ge—Sb—Te alloys;

• Ag—In—Sb—Te alloys;
• Ag—In—Sb—Te—V alloys;
• lithium niobate;
• methylnitro aniline;
• or any combinations thereof, the method comprising:
• radiating a first activation light onto the first and second light-to-heat converting layers to generate heat therein and change a pattern portion of the thermal sensitive material layer;
• and
• removing a non-pattern portion of the thermal sensitive material layer.