# US 8,182,662 B2 · Rotary cathode for magnetron sputtering apparatus

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- Number: US 8,182,662 B2
- Document ID: US8182662B2
- Status: Granted
- Kind: B2
- Application number: 12/413,121
- Filed: 2009-03-27
- Published: 2010-09-30
- Granted: 2012-05-22
- Earliest claimed: 2009-03-27
- Assignees: Sputtering Components, Inc.
- Inventors: Daniel Theodore Crowley
- Web page: https://patentgrep.com/patent/US8182662B2

## CPC

- C23C 14/3407: {Cathode assembly for sputtering apparatus, e.g. Target}
- H01J 37/3405: {Magnetron sputtering}
- H01J 37/342: {Hollow targets}
- H01J 37/3435: {Target holders (includes backing plates and endblocks)}
- H01J 37/3497: {Temperature of target}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A rotary cathode for a magnetron sputtering apparatus is disclosed. The rotary cathode comprises a rotatable target cylinder, and a non-rotatable interior structure in the target cylinder. The interior structure has an outer surface and an inner passageway. An outer passageway is defined between an inner surface of the target cylinder and the outer surface of the interior structure. An end cap is affixed at a distal end of the target cylinder. A rotating aperture is adjacent to an inner surface of the target cylinder at the distal end thereof, with the rotating aperture configured to direct a fluid toward the inner surface at the distal end. A fluid pathway is at least partially defined by the end cap, with the pathway providing fluid communication between the outer passageway and the inner passageway through the rotating aperture.

## Claims

### Claim 1

A rotary cathode for a magnetron sputtering apparatus, the rotary cathode comprising:
a rotatable target cylinder with an outer surface and an inner surface, the target cylinder having a proximal end and a distal end;
a non-rotatable interior structure in the target cylinder and extending from the proximal end to the distal end, the interior structure having an outer surface and an inner passageway;
an outer passageway defined between the inner surface of the target cylinder and the outer surface of the interior structure;
an end cap affixed at the distal end of the target cylinder, the end cap having a radial outer edge;
an aperture partially defined at a junction of the radial outer edge of the end cap and the inner surface of the target cylinder, the aperture configured to direct a fluid toward the inner surface of the target cylinder at the distal end; and
a fluid pathway at least partially defined by the end cap, the pathway providing fluid communication between the outer passageway and the inner passageway through the aperture;
wherein the aperture changes position along the radial outer edge of the end cap with respect to the non-rotatable interior structure as the target cylinder rotates.

### Claim 2 (depends on 1)

The rotary cathode of claim 1, wherein the target cylinder includes a target material on the outer surface thereof.

### Claim 3 (depends on 1)

The rotary cathode of claim 1, wherein the target cylinder comprises a target material.

### Claim 4 (depends on 1)

The rotary cathode of claim 1, further comprising a magnet array in the target cylinder that is supported by the interior structure.

### Claim 5 (depends on 1)

The rotary cathode of claim 1, further comprising a cover that slidably fits into a groove in the end cap adjacent to the aperture, the cover configured to adjust a size of the aperture.

### Claim 6 (depends on 1)

The rotary cathode of claim 1, wherein the aperture is defined by a rotatable fluid directing disc disposed in the outer passageway toward the distal end of the target cylinder and surrounding the interior structure, the disc adjacent to and spaced apart from the end cap.

### Claim 7 (depends on 6)

The rotary cathode of claim 6, wherein the fluid pathway is defined between the disc and the end cap.

### Claim 8 (depends on 7)

The rotary cathode of claim 7, wherein the interior structure has at least one opening in fluid communication with the pathway.

### Claim 9

A magnetron sputtering apparatus, comprising:
a cathode source assembly comprising:
a rotatable hollow drive shaft; and
a non-rotatable coolant conduit in the hollow drive shaft; and
a cathode target section removably coupled to the cathode source section, the cathode target section comprising:
a rotatable target cylinder with an outer surface and an inner surface, the target cylinder having a proximal end and a distal end, the target cylinder coupled to the drive shaft;
a non-rotatable interior structure in the target cylinder and extending from the proximal end to the distal end, the interior structure having an outer surface, and an inner passageway in fluid communication with the coolant conduit;
an outer passageway defined between the inner surface of the target cylinder and the outer surface of the interior structure;
a non-rotatable magnet array in the outer passageway and supported by the interior structure; and
an end cap affixed at the distal end of the target cylinder, the end cap having a radial outer edge;
an aperture partially defined at a junction of the radial outer edge of the end cap and the inner surface of the target cylinder, the aperture configured to direct a fluid toward the inner surface of the target cylinder at the distal end; and
a fluid pathway at least partially defined by the end cap, the pathway providing fluid communication between the outer passageway and the inner passageway through the aperture;
wherein the aperture changes position along the radial outer edge of the end cap with respect to the non-rotatable interior structure as the target cylinder rotates;
wherein during a coolant fill operation, the cathode target section is filled with a liquid coolant while the target cylinder is rotating such that substantially all trapped gas is removed from the cathode target section; and
wherein during a blow down operation, compressed gas is fed into the cathode target section while the target cylinder is rotating such that substantially all trapped liquid coolant is removed from the cathode target section.

### Claim 10 (depends on 9)

The apparatus of claim 9, further comprising a cover that slidably fits into a groove in the end cap adjacent to the aperture, the cover configured to adjust a size of the aperture.

### Claim 11 (depends on 9)

The apparatus of claim 9, wherein the aperture is defined by a rotatable fluid directing disc disposed in the outer passageway toward the distal end of the target cylinder and surrounding the interior structure, the disc adjacent to and spaced apart from the end cap.

### Claim 12 (depends on 11)

The apparatus of claim 11, wherein the fluid pathway is defined between the disc and the end cap.

### Claim 13 (depends on 12)

The apparatus of claim 12, wherein the interior structure has at least one opening in fluid communication with the pathway.