Electrostatic actuator apparatus
AssigneeKabushiki Kaisha Toshiba
InventorTamio Ikehashi
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Abstract
According to one embodiment, an electrostatic actuator apparatus includes a first voltage generation circuit configured to generate a first voltage, a first switch connected between the first voltage generation circuit and a first node, a second voltage generation circuit configured to generate a second voltage, a second switch connected between the second voltage generation circuit and a second node, a capacitor connected between the first node and the second node, an electrostatic actuator having a drive electrode connected to the first node, and a control circuit configured to perform an operation of sequentially turning on the first switch, turning off the first switch and turning on the second switch when the electrostatic actuator is driven.
Claims16
An electrostatic actuator apparatus comprising:
- a first voltage generation circuit configured to generate a first voltage;
- a first switch connected between the first voltage generation circuit and a first node;
- a second voltage generation circuit configured to generate a second voltage;
- a second switch connected between the second voltage generation circuit and a second node;
- a capacitor connected between the first node and the second node;
- an electrostatic actuator having a drive electrode connected to the first node;
- and
- a control circuit configured to perform an operation of sequentially turning on the first switch, turning off the first switch and turning on the second switch when the electrostatic actuator is driven.
Dependencies are inferred from the claim text.