Heat treatment apparatus emitting flash of light
AssigneeDainippon Screen Mfg. Co., Ltd.
InventorKenichi Yokouchi
Life of this patent
Estimating the term…
Abstract
Flash lamps connected to short-pulse circuits and flash lamps connected to long-pulse circuits are alternately arranged in a line. The duration of light emission from the flash lamps connected to the long-pulse circuits is longer than the duration of light emission from the flash lamps connected to the short-pulse circuits. A superimposing of a flash of light with a high peak intensity from the flash lamps that emit light for a short time and a flash of light with a gentle peak from the flash lamps that emit light for a long time can increase the temperature of even a deep portion of a substrate to an activation temperature or more without heating a shallow portion near the substrate surface more than necessary. This achieves the activation of deep junctions without causing substrate warpage or cracking.
Claims10
A heat treatment apparatus irradiating a substrate with a flash of light to heat the substrate, comprising:
- a holder for holding the substrate;
- a plurality of flash lamps emitting a flash of light toward the substrate held by said holder;
- a first lamp drive circuit causing the flash lamps to emit light for a duration of a first light-emission time;
- and
- a second lamp drive circuit causing the flash lamps to emit light for a duration of a second light-emission time longer than the first light-emission time,
- said first lamp drive circuit being connected to a first lamp group consisting of part of said plurality of flash lamps,
- said second lamp drive circuit being connected to a second lamp group consisting of the remainder of said plurality of flash lamps.
A heat treatment apparatus irradiating a substrate with a flash of light to heat the substrate, comprising:
- a holder holding the substrate;
- a first lamp group including a plurality of flash lamps emitting a flash of light toward the substrate held by said holder for a duration of a first light-emission time;
- and
- a second lamp group including a plurality of flash lamps emitting a flash of light toward the substrate held by said holder for a duration of a second light-emission time longer than the first light-emission time.
Dependencies are inferred from the claim text.