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US 8,172,291 B2Granted
Substrate transport apparatus and substrate transport method
AssigneeOlympus Corporation
InventorHiroyasu Hebiishi
Life of this patent
Estimating the term…
Abstract
A substrate transport apparatus includes: a pair of arm units having a substrate-carrying surface on which a substrate is placed; a support member freely rotatably supporting the arm unit; and an inclination device inclining the arm unit with each of the substrate-carrying surface facing one another.
Claims16
A substrate transport apparatus, comprising:
- a pair of arm units each having a substrate-carrying surface on which a substrate is placed;
- a support member which freely rotatably supports the arm units;
- and
- an inclination device which inclines the arm units such that the substrate-carrying surfaces thereof face one another,
- wherein the substrate-carrying surface rotates about a rotation axis positioned on the substrate-carrying surface.
2 more elements
A substrate transport method in which a substrate is transported on an arm unit, the method comprising:
- moving the arm unit having a substrate-carrying surface inclined toward a horizontal plane to a position where the substrate is placed;
- and
- placing the substrate on the inclined arm unit,
- wherein the substrate-carrying surface rotates about a rotation axis position on the substrate-carrying surface.
1 more element
Dependencies are inferred from the claim text.