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US 8,168,128 B2Granted
Plasma reactor
AssigneeEdwards Limited
InventorsAndrew James Seeley, Marilena Radoiu
Life of this patent
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Abstract
A plasma reactor (10) comprises a microwave resonant cavity (12) having a gas inlet (18) and a gas outlet (20), a waveguide (14) for conveying microwave radiation to the resonant cavity, and a plasma torch (40) for injecting into the resonant cavity a plasma stream containing ions for reacting with a gas flowing from the gas inlet (18) to the gas outlet (20).
Claims10
A plasma reactor comprising:
- a microwave resonant cavity having a gas inlet and a gas outlet;
- a waveguide for conveying microwave radiation to the resonant cavity;
- and
- a plasma torch for injecting into the resonant cavity a plasma stream containing ions for reacting with a gas to be treated flowing from the gas inlet to the gas outlet
- wherein the plasma torch is adapted to receive the gas to be treated, and convey the gas to be treated to the plasma stream for injection into the microwave resonant cavity with the ions.
2 more elements
Dependencies are inferred from the claim text.