Apparatus for an enhanced magnetic plating method
AssigneeInternational Business Corporation
InventorsMatteo Flotta, Lubomyr T. Romanikiw, Xiaoyan Shao, Steven Erik Steen, Bucknell Chapman Webb
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Abstract
An apparatus for plating a magnetic film on a substrate includes: a track including a plurality of stopping points along the track; a permanent magnet placed on the track such that the permanent magnet can be moved along the track towards and away from the stopping points; at least one plating tank positioned on the stopping point; and a removable high permeability iron flux concentrator inserted into gaps between the substrate and inside walls of the plating tank, substantially surrounding the substrate and extending around and under the substrate.
Claims9
An apparatus for plating magnetic film on a substrate, the apparatus comprising:
- a track comprising a plurality of stopping points along said track;
- a permanent magnet mounted on the track such that said permanent magnet can be moved along the track towards and away from the plurality of the stopping points along the track;
- a first electrolytic plating cell positioned on a first stopping point, wherein said first electrolytic plating cell comprises a tank containing an aqueous solution and a substrate holder, and the substrate holder is disposed within said aqueous solution;
- a conformable flux concentrator inserted into the first electrolytic plating cell, such that said conformable flux concentrator is inserted into gaps between the substrate holder and inside walls of the tank, substantially surrounding the substrate holder and extending around and under the substrate holder;
- wherein the permanent magnet is configured to surround the first electrolytic plating cell when the permanent magnet is positioned at the first stopping point;
- wherein the permanent magnet is adapted to magnetize a substrate mounted on the substrate holder disposed within the first electrolytic plating cell;
- and
- wherein the magnetization is facilitated by the conformable flux concentrator.
Dependencies are inferred from the claim text.