Method and device for transferring a pattern from a stamp to a substrate

A device, for application in a process of transferring a pattern from a stamping surface of a stamp to a receiving surface of a substrate, wherein at least one of the stamping surface and the receiving surface is flexible, the device comprising:

• means for suspending a substrate having a receiving surface;
• means for suspending a stamp having a stamping surface including a pattern;
• and
• at least one actuation unit for moving a portion of a flexible one of the stamping surface and the receiving surface in a direction toward another of the stamping surface and the receiving surface;
• wherein the at least one actuation unit and a surface to be partially actuated are moved with respect to each other,
• wherein the mutual movement of the at least one actuation unit and the partially actuated surface is a continuous, uninterrupted movement.

A method for transferring a pattern from a stamping surface of a stamp to a receiving surface of a substrate, wherein at least one of the stamping surface and the receiving surface is flexible, the method comprising:

• creating for period of time and subsequently removing successive transfer areas, in which the stamp locally transfers the pattern to the substrate, by applying at least one actuation unit for moving a portion of a flexible one of the stamping surface and the receiving surface in a direction toward another of the stamping surface and the receiving surface, wherein the at least one actuation unit is adapted to exert a predetermined pressure on a portion of the partially actuated surface, wherein the at least one actuation unit and a surface to be partially actuated are movable with respect to each other during the transfer of the pattern from the stamping surface, and the mutual movement of the at least one actuation unit and the partially actuated surface is a continuous, uninterrupted movement,
• monitoring a mutual position of the stamp and the substrate throughout the pattern transferring process by looking at a pattern of the receiving surface of the substrate and the pattern of the stamping surface of the stamp, and
• in case a misalignment of the pattern of the receiving surface of the substrate and the pattern of the stamping surface of the stamp is found, correcting the mutual position of the stamp and the substrate by displacing the stamp and the substrate with respect to each other until a proper alignment of the pattern of the receiving surface of the substrate and the pattern of the stamping surface of the stamp is obtained.

A device, for application in a process of transferring a pattern from a stamping surface of a stamp to a receiving surface of a substrate, wherein at least one of the stamping surface and the receiving surface is flexible, wherein the device comprises:

• means for suspending a substrate having a receiving surface;
• means for suspending a stamp having a stamping surface including a pattern;
• at least one actuation unit for moving a portion of a flexible one of the stamping surface and the receiving surface in a direction toward another of the stamping surface and the receiving surface, wherein the at least one actuation unit and a portion of a flexible one of the stamping surface are movable with respect to each other during the transfer of the pattern from the stamping surface, and the mutual movement of the at least one actuation unit and the portion of a flexible one of the stamping surface is a continuous, uninterrupted movement;
• image detection means, which are arranged for simultaneously looking at the receiving surface of the substrate and the stamping surface of the stamp;
• and
• interpreting and controlling means for interpreting images obtained by the image detection means and for controlling the mutual position of the stamp and the substrate on the basis of an outcome of the interpretation of the images, such as to obtain a proper alignment of the receiving surface of the substrate and the stamping surface of the stamp;
• wherein components of the device in a path extending between the image detection means and the place where the images are to be taken are transparent.