Ultra dark polymer
AssigneeTexas Instruments Incorporated
InventorJason Michael Neidrich
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Abstract
A method and a material for creating an antireflective coating on an integrated circuit. A preferred embodiment comprises applying a dark polymer material on a reflective surface, curing the dark polymer material, and roughening a top surface of the dark polymer material. The roughening can be achieved by ashing the dark polymer material in an ash chamber. The dark polymer material, preferably a black matrix resin or a polyimide black matrix resin, when ashed in an oxygen rich atmosphere for a short period of time, forms a surface that is capable of absorbing light as well as randomly refracting light it does not absorb. A protective cap layer may be formed on top of the ashed dark polymer material to provide protection for the dark polymer material.
Claims10
An integrated circuit comprising:
- a substrate containing transistors and conductors, wherein the substrate is covered with an antireflective coating formed from a dark polymer matrix, the antireflective coating protected by an aluminum protective layer created by sputter deposition and then oxidized;
- and
- an array of light modulators comprising an array of liquid crystal elements formed on top of the dark polymer matrix, the array of light modulators comprising electrodes formed on the dark polymer matrix and deflectable members spaced apart from the electrodes, the array of light modulators configured to modulate light based upon image data to display the image data on a display plane.
An integrated circuit comprising:
- a substrate containing transistors and conductors, wherein the substrate is covered with an antireflective coating formed from a dark polymer matrix, the antireflective coating protected by an aluminum protective layer created by sputter deposition and then oxidized;
- and
- an array of light modulators formed on top of the dark polymer matrix, the array of light modulators comprising electrodes formed on the dark polymer matrix and deflectable members spaced apart from the electrodes, the array of light modulators configured to modulate light based upon image data to display the image data on a display plane.
Dependencies are inferred from the claim text.