Method for providing and utilizing an electronic lapping guide in a magnetic recording transducer
AssigneeWestern Digital (Fremont), LLC
InventorsSteven C. Rudy, Matthew R. Gibbons, Curtis V. Macchioni, Yun-Fei Li, Changhe Shang, Carlos Corona
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Abstract
A method for providing an electronic lapping guide (ELG) for a structure in a magnetic transducer are described. The structure has a front edge and a back edge. The ELG includes a stripe having a top edge and a bottom edge. The method includes calibrating a sheet resistance of the stripe and calibrating an offset of the top edge of the stripe from the back edge of the structure. The method further includes terminating the lapping based at least on the sheet resistance and offset of the ELG.
Claims9
A method for providing an electronic lapping guide (ELG) for a structure in a magnetic transducer, the structure having a front edge and a back edge, the ELG including a stripe having a top edge and a bottom edge, the method comprising:
- calibrating a sheet resistance of the stripe;
- calibrating an offset of the top edge of the stripe from the back edge of the structure;
- and
- terminating the lapping based on at least the sheet resistance and the offset of the ELG,
- wherein the step of calibrating the sheet resistance further includes:
- providing at least one Van der Pauw test pattern corresponding to the ELG for the structure;
- measuring at least one test resistance of the Van der Pauw test pattern;
- and
- determining the sheet resistance based on the at least one test resistance.
A method for providing an electronic lapping guide (ELG) for a structure in a magnetic transducer, the structure having a front edge and a back edge, the ELG including a stripe having a top edge and a bottom edge, the method comprising:
- calibrating a sheet resistance of the stripe including
- providing at least one Van der Pauw test pattern corresponding to the ELG for the structure, the ELG and the structure being substantially coplanar;
- measuring at least one test resistance of the Van der Pauw test pattern;
- and
- determining the sheet resistance based on the at least one test resistance;
- calibrating an offset of the top edge of the stripe from the back edge of the structure including
- providing a plurality of test stripes having a plurality of heights corresponding to a plurality of mask dimensions;
- measuring at least one test resistance of each of the plurality of test stripes;
- determining each of the plurality of heights based on the at least one test resistance;
- and
- determining a correction factor between the plurality of heights and the plurality of mask dimensions;
- and
- terminating the lapping based on at least the sheet resistance and the offset of the ELG.
Dependencies are inferred from the claim text.