# US 8,148,977 B2 · Apparatus for characterizing a magnetic field in a magnetically enhanced substrate processing system

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- Number: US 8,148,977 B2
- Document ID: US8148977B2
- Status: Granted
- Kind: B2
- Application number: 12/360,664
- Filed: 2009-01-27
- Published: 2010-07-29
- Granted: 2012-04-03
- Earliest claimed: 2009-01-27
- Assignees: Applied Materials, Inc.
- Inventors: Kartik Ramaswamy; Hiroji Hanawa; Lawrence Wong; Chinh Dinh
- Web page: https://patentgrep.com/patent/US8148977B2

## CPC

- G01R 33/0206: {Three-component magnetometers}
- G01R 33/0023: {Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration (G01R33/0017 takes precedence)}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

Embodiments of sensor devices for characterizing magnetic fields formed in substrate processing systems and methods of use thereof are provided herein. In some embodiments, an apparatus for characterizing a magnetic field in a substrate processing system may include a carrier having a form substantially similar to a substrate to be processed in the substrate processing system. One or more magnetic sensors are disposed on the carrier for measuring a magnitude of a magnetic field formed in the processing system in an x-, y-, and z-direction. A microprocessor is coupled to the one or more magnetic sensors to sample data representative of the magnitude of the magnetic field in the x-, y-, and z-directions proximate a position of each sensor. A memory device is coupled to the microprocessor for storing the sampled data. A power source is provided to supply power to each magnetic sensor and the microprocessor.

## Claims

### Claim 1

An apparatus for characterizing a magnetic field in a substrate processing system, comprising:
a carrier having a form substantially similar to a substrate to be processed in the substrate processing system;
one or more magnetic sensors disposed on the carrier for measuring a magnitude of a magnetic field formed in the processing system in an x-, y-, and z-direction;
a microprocessor coupled to the one or more magnetic sensors to sample data representative of the magnitude of the magnetic field in the x-, y-, and z-directions proximate a position of each sensor;
a memory device coupled to the microprocessor for storing the sampled data; and
a power source to supply power to each sensor and the microprocessor.

### Claim 2 (depends on 1)

The apparatus of claim 1, wherein the microprocessor, memory device, and power source are disposed on the carrier.

### Claim 3 (depends on 1)

The apparatus of claim 1, wherein the microprocessor, memory device, and power source are disposed remote from the carrier and coupled to the one or more magnetic sensors via a wire.

### Claim 4 (depends on 1)

The apparatus of claim 1, further comprising:
a transmitter disposed on the carrier and coupled to the one or more magnetic sensors; and
a receiver disposed remote from the carrier and configured to wirelessly communicate with the transmitter;
wherein the microprocessor and memory device are disposed remote from the carrier and coupled to the receiver.

### Claim 5 (depends on 4)

The apparatus of claim 4, wherein the power source comprises:
a first power source disposed on the carrier and coupled to the one or more magnetic sensors; and
a second power source disposed remote from the carrier and coupled to the microprocessor.

### Claim 6 (depends on 1)

The apparatus of claim 1, wherein the one or more magnetic sensors comprise:
a plurality of magnetic sensors arranged about an upper surface of the carrier.

### Claim 7 (depends on 1)

The apparatus of claim 1, further comprising:
an analog-to-digital converter coupled between the one or more magnetic sensors and the microprocessor.

### Claim 8 (depends on 1)

The apparatus of claim 1, wherein the memory device comprises:
an integrated memory device disposed on the carrier.

### Claim 9 (depends on 1)

The apparatus of claim 1, wherein the memory device comprises:
at least one of an integrated memory device, a magnetic storage medium, or an optical storage medium.

### Claim 10 (depends on 1)

The apparatus of claim 1, wherein the power source comprises:
a battery.

### Claim 11 (depends on 10)

The apparatus of claim 10, wherein the battery is disposed on the carrier and is non-magnetic.

### Claim 12 (depends on 10)

The apparatus of claim 10, wherein the battery is rechargeable.

### Claim 13 (depends on 1)

The apparatus of claim 1, wherein the power source comprises:
an AC or DC power source disposed remote from the carrier.