Formed product of line-structured substance composed of carbon element, and method of forming the same
AssigneeFujitsu Limited
InventorShintaro Sato
Life of this patent
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Abstract
The present invention proposes a method of readily and reliably forming CNTs independent of a substrate allowing a catalyst metal to deposit thereon, or an underlying material, even for the case where the substrate is not used, in which a titanium-cobalt composite particles are deposited, using a catalyst particle production system, on an insulating film formed on a silicon substrate, and CNTs are grown from the from titanium-cobalt composite particles by the CVD process.
Claims9
A formed product of a line-structured substance composed of carbon element comprising:
- a substrate made of a single species selected from silicon (Si), silicon oxide (SiO2), tantalum (Ta) and molybdenum (Mo);
- a composite particle formed on the substrate, composed of only a first metal as a catalyst metal, and a second metal adjusting catalytic action of said first metal and controlling a growth probability of a line-structured substance composed of carbon element;
- and
- a line-structured substance composed of carbon element grown from said composite particle that serves as a nucleus,
- wherein said first metal is cobalt (Co), and said second metal is one or both of vanadium (V) and tantalum (Ta),
- wherein said composite particle and said line-structured substance are united, and
- wherein said composite particle has a content of said second metal of 0.5% to 50%, both ends inclusive.
A method of forming a line-structured substance composed of carbon element comprising the steps of:
- on a substrate made of a single species selected from silicon (Si), silicon oxide (SiO2), tantalum (Ta) and molybdenum (Mo), forming a composite particle composed of only a first metal as a catalyst metal, and a second metal adjusting catalytic action of said first metal and controlling a growth probability of a line-structured substance composed of carbon element;
- and
- forming a line-structured substance composed of carbon element as grown on said composite particle, by subjecting said composite particle to treatment for growth of said line-structured substance,
- wherein a formed product of a line-structured substance composed by uniting said composite particle and said line-structured substance is formed,
- wherein said first metal is cobalt (Co), and said second metal is one or both of vanadium (V) and tantalum (Ta), and
- wherein said composite particle is formed while controlling content of said second metal to 0.5% to 50%, both ends inclusive.
A formed product of a line-structured substance composed of carbon element comprising:
- a substrate made of a single species selected from silicon (Si), silicon oxide (SiO2), tantalum (Ta) and molybdenum (Mo);
- an insulating film having a viahole, formed above said substrate;
- and
- a conductive plug formed in said viahole, wherein said conductive plug has:
- a composite particle formed on the bottom surface of said viahole, composed of only a first metal as a catalyst metal, and a second metal adjusting catalytic action of said first metal and controlling a growth probability of a line-structured substance composed of carbon element;
- and
- a line-structured substance composed of carbon element grown from said composite particle that serves as a nucleus,
- wherein said first metal is cobalt (Co), and said second metal is one or both of vanadium (V) and tantalum (Ta).
Dependencies are inferred from the claim text.