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US 8,148,708 B2Granted
Resistive memory device and method of fabricating the same
AssigneeHynix Semiconductor Inc.
InventorsYun-Taek Hwang, Yu-Jin Lee
Life of this patent
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Abstract
A resistive memory device includes a first conductive line on a substrate, a vertical selection diode comprising a nanowire or a nanotube and being arranged over the first conductive line, a resistive element including a resistive layer arranged over the vertical selection diode; and a second conductive line arranged over the resistive element.
Claims18
A resistive memory cell, comprising:
- a first conductive line on a substrate;
- a selection diode comprising a vertical nanotube and being arranged over the first conductive line;
- a resistive element including a resistive layer arranged over the selection diode;
- and a second conductive line arranged over the resistive element;
- wherein the vertical nanotube includes a carbon nanotube.
2 more elements
A resistive memory device with a cross-point structure, the device comprising:
- first conductive lines arranged in parallel over a substrate;
- second conductive lines arranged in parallel, spaced upwardly from the first conductive lines and extending across the first conductive lines;
- and a plurality of first resistive memory cells each being interposed between one of the first conductive lines and one of the second conductive lines at a cross-point of the first conductive line and the second conductive line, each first resistive memory cell comprising a first selection diode and a first resistive element stacked one upon another;
- wherein the first selection diode comprises a nanotube, and the first resistive element includes a first resistive layer;
- and wherein the vertical nanotube includes a carbon nanotube.
2 more elements
A method of fabricating a resistive memory device, the method comprising:
- forming a first conductive line over a substrate;
- forming a selection diode by growing a vertical over the first conductive line;
- forming a resistive element including a resistive layer over the selection diode;
- and forming a second conductive line over the resistive element;
- wherein the vertical nanotube includes a carbon nanotube.
2 more elements
Dependencies are inferred from the claim text.