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AssigneeNihon Micro Coating Co., Ltd.
InventorsSanaki Horimoto, Takuya Nagamine, Takehiro Watanabe, Fumi Murokawa, Yuji Horie, Noriyuki Kumasaka, Masahiro Hosoi
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An oxide superconductor member is composed of a tape-shaped substrate, an intermediate layer formed on this substrate and an oxide superconductor thin film layer formed on this intermediate layer. A surface of the tape-shaped substrate is polished by continuously running the tape-shaped substrate. The polishing step includes initial polishing process and finishing process which are carried out such that the average surface roughness Ra of the substrate becomes 2 nanometers or less and the in-plane directionality of the intermediate layer becomes 5° or less after the polishing step.
A method of polishing a target surface of a tape-shaped substrate, wherein said tape-shaped substrate, an intermediate layer that is formed on said tape-shaped substrate and an oxide superconductor thin film layer that is formed on said intermediate layer form an oxide superconductor member, said method comprising a polishing step of polishing said target surface while continuously running said tape-shaped substrate in a specified direction, said polishing step including an initial polishing process of carrying out random rotary polishing of said target surface of said tape-shaped substrate in at least one stage and thereby removing surface scratches formed by a rolling process and crystalline defects of said tape-shaped substrate and a finishing process of polishing said target surface of said tape-shaped substrate in said specified direction in at least one stage and thereby finishing said target surface into a smooth and flat surface, wherein the average surface roughness Ra of said target surface becomes 2 nanometer or less and the in-plane directionality Δφ of said intermediate layer becomes 5° or less after said polishing step.
Dependencies are inferred from the claim text.