# US 8,147,234 B2 · Imprint apparatus and method for fine structure lithography > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,147,234 B2 - Document ID: US8147234B2 - Status: Granted - Kind: B2 - Application number: 12/343,550 - Filed: 2008-12-24 - Published: 2009-07-02 - Granted: 2012-04-03 - Earliest claimed: 2007-12-27 - Assignees: Hitachi Industrial Equipment Systems Co., Ltd. - Inventors: Masahiko Ogino; Mitsuru Hasegawa; Akihiro Miyauchi - Web page: https://patentgrep.com/patent/US8147234B2 ## CPC - B29C 59/04: using rollers or endless belts - B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic - B82Y 40/00: Manufacture or treatment of nanostructures - G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping} - B29C 35/16: Cooling {(cooling extruded material B29C48/911; cooling preforms for blow moulding B29C49/6427; cooling blown articles B29C49/66; cooling tyres during post cure inflation B29D30/0643)} - B29C 2059/023: {Microembossing} - B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00) - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract An imprint apparatus for forming fine structure lithography comprises: a belt-like mold having a fine structure for imprint lithography formed on a surface of the belt-like mold; a cylindrical pressurizing mechanism including a pair of opposed rolls for pressurizing the belt-like mold against the surface of the imprinting object; and a supporting member for supporting the imprinting object at a position between the rolls of the cylindrical pressurizing mechanism. The belt-like mold, the imprinting object and the supporting member are configured to move to the cylindrical pressurizing mechanism in a mutually non-contact state, and then at the position between the rolls, be pressurized by the cylindrical pressurizing mechanism in a state where the imprinting object is positioned between the belt-like mold and the supporting member. ## Claims ### Claim 1 An imprint apparatus for forming fine structure lithography onto a surface of an imprinting object, comprising: a belt-like mold having a fine structure for imprint lithography formed on a surface of the belt-like mold; a cylindrical pressurizing mechanism including a pair of opposed rolls with a heater incorporated in the rolls for pressing the belt-like mold against the surface of the imprinting object while heating the belt-like mold and the imprinting object; a supporting member for supporting the imprinting object at a position between the rolls of the cylindrical pressurizing mechanism; and a separating mechanism for separating the belt-like mold and the supporting member from the imprinting object at a position downstream of the cylindrical pressurizing mechanism position, the separating mechanism comprising a first pair of opposed separating rolls at a position downstream of the cylindrical pressurizing mechanism and a second pair of opposed separating rolls at a position downstream of the first pair of opposed separating rolls, wherein a gap between the second pair of opposed separating rolls is adjustable to be greater than a gap between the first pair of opposed separating rolls to provide an adjustable separating angle of the belt-like mold and the supporting member from the imprinting object, wherein the belt-like mold, the imprinting object, the supporting member and the separating mechanism are configured to move to the cylindrical pressurizing mechanism in a mutually non-contact state, then at the position between the rolls, be pressed by the rolls of the cylindrical pressurizing mechanism while being heated with direct heat transfer from the rolls in a state where the imprinting object is positioned between the belt-like mold and the supporting member, and then be separated from each other by the separating mechanism at the position downstream of the cylindrical pressurizing mechanism position. ### Claim 2 (depends on 1) The imprint apparatus according to claim 1, wherein the supporting member has a belt-like shape. ### Claim 3 (depends on 1) The imprint apparatus according to claim 1, wherein material for the supporting member is the same as that for the belt-like mold. ### Claim 4 (depends on 1) The imprint apparatus according to claim 1, wherein the material for the supporting member has flexibility. ### Claim 5 (depends on 1) The imprint apparatus according to claim 1, wherein the imprinting object is a strip-like film having a thickness of 100 μm or less. ### Claim 6 (depends on 1) The imprint apparatus according to claim 1, wherein the cylindrical pressurizing mechanism has an elastic member formed on a surface thereof. ### Claim 7 (depends on 1) The imprint apparatus according to claim 1, further comprising: an imprinting object-feeding mechanism for feeding the imprinting object to the cylindrical pressurizing mechanism; and a mold-supporting mechanism for supporting the belt-like mold up to the cylindrical pressurizing mechanism in a non-contact state with respect to the imprinting object. ### Claim 8 (depends on 7) The imprint apparatus according to claim 7, wherein the mold-supporting mechanism has a plurality of rolls including one of the rolls of the cylindrical pressurizing mechanism, and supports the belt-like mold so as to endlessly move the belt-like mold. ### Claim 9 (depends on 1) The imprint apparatus according to claim 1, wherein a cooling mechanism for cooling the imprinting object is disposed between the cylindrical pressurizing mechanism and the separating mechanism.