# US 8,146,902 B2 · Hybrid composite wafer carrier for wet clean equipment > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,146,902 B2 - Document ID: US8146902B2 - Status: Granted - Kind: B2 - Application number: 11/743,516 - Filed: 2007-05-02 - Published: 2008-06-26 - Granted: 2012-04-03 - Earliest claimed: 2006-12-21 - Assignees: Lam Research Corporation - Applicants: Helen Cheng, legal representative - Inventors: Wing Lau Cheng; Arnold Kholodenko - Web page: https://patentgrep.com/patent/US8146902B2 ## CPC - B32B 5/26: another layer {next to it} also being fibrous or filamentary {(relative arrangement of fibres or filaments of different layers B32B5/12)} - B32B 5/28: impregnated with or embedded in a plastic substance {(not used)} - B32B 27/04: as impregnant, bonding, or embedding substance {(not used)} - H10P 72/0414: {using mainly spraying means, e.g. nozzles} - H10P 72/18: {characterised by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports} - H10P 72/3306: {Horizontal transfer of a single workpiece} - H10P 72/7618: {characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel} - Y10S 269/90: Supporting structure having work holder receiving apertures or projections - Y10S 269/901: Collapsible or foldable work holder supporting structure - Y10T 428/237: Noninterengaged fibered material encased [e.g., mat, batt, etc.] - Y10T 428/24995: Two or more layers - Y10T 428/31515: As intermediate layer - B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract A carrier structure for supporting a substrate when being processed by passing the carrier through a meniscus formed by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening, the opening being slightly larger than the substrate such that a gap exists between the substrate and the opening. The frame comprises a composite core, a top sheet, a bottom sheet, a layer of aramid fabric between the top sheet and the core and a second layer of aramid fabric between the bottom sheet and the core. The top sheet and the bottom sheet being formed from a polymer material. A method of manufacture is also described. ## Claims ### Claim 1 A carrier for supporting a substrate, the carrier comprising: a frame having a top surface, a bottom surface and six sides, wherein a first side and a second side are parallel to each other and have thickened edges, third and fourth sides and fifth and sixth sides are respectively defined between the first side and the second side, wherein third, fourth, fifth and sixth sides are angled away from a perpendicular direction defined from the first side or the second side, the frame having an opening sized for receiving a substrate; and a plurality of support pins for supporting the substrate within the opening, the opening being slightly larger than the substrate such that a gap exists between the substrate and the opening, the plurality of pins coupled to the frame and extending into the opening in a parallel orientation relative to the top and bottom surfaces of the frame; the frame comprising a composite core, a top sheet defining the top surface, and a bottom sheet defining the bottom surface, and a layer of aramid fabric between the top sheet and the composite core, wherein the top sheet and the bottom sheet comprise a polymer material with a defined hydrophobicity. ### Claim 2 (depends on 1) The carrier of claim 1, further comprising a second layer of aramid fabric between the bottom sheet and the composite core. ### Claim 3 (depends on 1) The carrier of claim 1, wherein the frame has a slight arch so that when the frame is under the load of carrying a substrate, the frame substantially flattens out for minimal vertical displacement from a plane. ### Claim 4 (depends on 1) The carrier of claim 1, wherein the composite core comprises a molded carbon fiber composite material having an epoxy matrix. ### Claim 5 (depends on 1) The carrier of claim 1, wherein the composite core comprises at least one layer of uni-directional pre-impregnated carbon fiber material. ### Claim 6 (depends on 5) The carrier of claim 5, wherein the unidirectional pre-impregnated carbon fiber material is disposed such that carbon fibers are oriented perpendicular to left and right edges of the carrier. ### Claim 7 (depends on 1) The carrier of claim 1, wherein the top sheet and bottom sheet are formed of polyvinylidene fluoride. ### Claim 8 (depends on 1) The carrier of claim 1, wherein the aramid fabric is pre-impregnated with epoxy. ### Claim 9 (depends on 1) The carrier of claim 1, wherein the carrier further comprises a filler material formed from thermoplastic powder that is sintered or binded during a thermal cycling treatment during manufacture of the carrier. ### Claim 10 (depends on 1) The carrier of claim 1, wherein the support pins are formed from one of polyvinylidene fluoride or polyetheretherketone, or rigid materials. ### Claim 11 A carrier for supporting a substrate, the carrier comprising: a frame having a thickness that is greater than 0.8 mm and up to about 1.5 mm, the frame having a top surface, a bottom surface and six sides, wherein a first side and a second side are parallel to each other and have thickened edges, third and fourth sides and fifth and sixth sides are respectively defined between the first side and the second side, wherein third, fourth, fifth and sixth sides are angled up to about 30 degrees away from a perpendicular direction defined from the first side or the second side, the frame having an opening sized for receiving the substrate; and four support pins for supporting the substrate within the opening, the opening being slightly larger than the substrate such that a gap exists between the substrate and the opening, the four support pins coupled to the frame in the opening and extending partially into the opening in a parallel orientation relative to the top and bottom surfaces of the frame; the frame comprising a composite core, a top sheet defining the top surface, and a bottom sheet defining the bottom surface, and a layer of aramid fabric between the top sheet and the composite core, wherein the top sheet and the bottom sheet comprise a polymer material with a defined hydrophobicity, wherein the top and bottom sheets encapsulate the composite core and the layer of aramid fabric over the top and bottom surfaces and in the opening. ### Claim 12 (depends on 11) The carrier of claim 11, further comprising a second layer of aramid fabric between the bottom sheet and the composite core. ### Claim 13 (depends on 11) The carrier of claim 11, wherein the frame has a slight arch so that when the frame is under the load of carrying a substrate, the frame substantially flattens out for minimal vertical displacement from a plane. ### Claim 14 (depends on 11) The carrier of claim 11, wherein the composite core comprises a molded carbon fiber composite material having an epoxy matrix. ### Claim 15 (depends on 11) The carrier of claim 11, wherein the composite core comprises at least one layer of uni-directional pre-impregnated carbon fiber material. ### Claim 16 (depends on 11) The carrier of claim 11, wherein the four pins are defined from one of polyvinylidene fluoride or polyetheretherketone, or a rigid material.