Method for providing a perpendicular magnetic recording (PMR) transducer

A method for providing a perpendicular magnetic recording (PMR) transducer including a PMR pole formed from at least one pole layer, the method comprising;

• providing a first chemical mechanical planarization (CMP) stop layer on the at least one pole layer, the first CMP stop layer including at least one of Ru, Ta, and Ti;
• providing a second CMP stop layer on the first CMP stop layer, the second CMP stop layer including at least one of SiC and diamond-like carbon;
• providing a mask on the second CMP stop layer, a first portion of the mask residing on a portion of the at least one pole layer from which the PMR pole is formed;
• defining the PMR pole after the mask is provided;
• providing an intermediate layer on the PMR pole, the intermediate layer substantially surrounding at least the PMR pole;
• performing a first CMP on at least the intermediate layer, a first portion of the second CMP stop layer being removed during the first CMP, a second portion of the second CMP stop layer remaining after the first CMP;
• removing the second portion of the second CMP stop layer;
• performing a second CMP, at least a portion of the first CMP stop layer remaining after the second CMP is performed;
• removing a remaining portion of the at least one pole layer separated from the PMR pole after the step of performing the second CMP;
• providing a write gap on the PMR pole;
• and
• providing a shield on the write gap.