High pressure isolation valve system

A method for opening an isolation valve, said isolation valve having a main body, an actuator body, a sealing membrane at a high pressure portion of said isolation valve system, mechanically attaching said actuator body to said main body, said sealing membrane sealing said high pressure portion of said isolation valve system from a low pressure portion of said isolation valve system, a burst plug, arranged against said main body and supporting said actuator body;

• and an activation arrangement, said method comprising the steps of:
• displacing said burst plug at least partially by operating said activation arrangement;
• and
• moving, by means of said high pressure, said actuator body a distance allowed by said at least partial displacement of said burst plug;
• breaking said sealing membrane by said moving;
• and
• flowing a gas from said high pressure portion of said isolation valve system through said broken sealing membrane to a low pressure portion of said isolation valve system,
• wherein said step of displacing comprises heating of said burst plug, and
• said step of heating comprises driving a high DC-current through a metal film structure arranged in vicinity of said burst plug.

A manufacturing method for an isolation valve comprising the steps of:

• providing a number of substrates;
• creating micromechanical structures in said substrates;
• said micromechanical structures together forming a main body, an actuator body and a sealing membrane;
• said sealing membrane mechanically connecting said actuator body to said main body;
• arranging a burst plug against said main body and for supporting said actuator body;
• providing an activation arrangement for allowing an at least partial displacement of said burst plug;
• bonding said substrates together into a stack, whereby said sealing membrane being arranged for sealing a high pressure portion of said isolation valve system from a low pressure portion of said isolation valve system.