Machine vision technique for manufacturing semiconductor wafers
AssigneeCognex Corporation
InventorsJohn W. Schwab, Gang Liu, David J. Michael
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AssigneeCognex Corporation
InventorsJohn W. Schwab, Gang Liu, David J. Michael
Estimating the term…
A vision system is provided to determine a positional relationship between a photovoltaic device wafer on a platen and a printing element, such as a printing screen, on a remote side of the photovoltaic device wafer from the platen. A source emits ultraviolet light along a path that is transverse to a longitudinal axis of an aperture through the platen, and a diffuser panel is located along that path. A reflector directs the light from the diffuser panel toward the aperture. A video camera is located along the longitudinal axis of the aperture and produces an image using light received from the platen aperture, wherein some of that received light was reflected by the wafer. A band-pass filter is placed in front of the camera to block ambient light. The use of diffused ultraviolet light enhances contrast in the image between the wafer and the printing element.
A vision system for determining a positional relationship between a photovoltaic device wafer and a printing element, wherein the photovoltaic device wafer is on a platen that has an aperture there through with an edge of the photovoltaic device wafer extending across the aperture, and wherein the printing element is located on a remote side of the photovoltaic device wafer from the platen, said vision system comprising:
A vision system for determining a positional relationship between a photovoltaic device wafer and a printing element, wherein the photovoltaic device wafer is on a platen that has an aperture there through and the printing element is located on a remote side of the photovoltaic device wafer from the platen, the vision system comprises:
A method for determining a positional relationship between a photovoltaic device wafer on a platen and a printing element on a remote side of the photovoltaic device wafer from the platen, said method comprising:
Dependencies are inferred from the claim text.