Spectroscopy module, and method for manufacturing the same
AssigneeHamamatsu Photonics K.K.
InventorKatsumi Shibayama
Life of this patent
Estimating the term…
Abstract
In a spectroscopy module 1, a light passing hole 5b through which a light L1 advancing to a spectroscopic portion 4 passes is formed in a light detecting element 5. Therefore, it is possible to prevent the relative positional relationship between the light passing hole 5b and a light detecting portion 5a of the light detecting element 5 from deviating. Moreover, the light to be measured L1 advancing to the spectroscopic portion 4 via the light passing hole 5b and the diffracted lights L2 advancing to the light detecting portion 5a from the spectroscopic portion 4 pass through a void formed between the light detecting element 5 and the substrate 2 by an opening portion 10a of a wiring substrate 10. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.
Claims8
A spectroscopy module comprising:
- a body portion through which light is allowed to transmit;
- a spectroscopic portion that disperses a light made incident into the body portion from a side of a predetermined plane of the body portion, and reflects lights to the side of the predetermined plane;
- and
- a light detecting element disposed on the predetermined plane via an intermediate substrate, and having a light detecting portion to detect the lights dispersed by the spectroscopic portion, wherein
- a light passing hole, through which the light advancing to the spectroscopic portion passes, is formed in the light detecting element, and
- wherein an opening portion through which both the light advancing to the spectroscopic portion via the light passing hole and the lights advancing to the light detecting portion from the spectroscopic portion pass, is formed in the intermediate substrate.
A method for manufacturing a spectroscopy module, which is provided with a body portion through which light is allowed to transmit, a spectroscopic portion that disperses a light made incident into the body portion from a side of a predetermined plane of the body portion, and reflects lights to the side of the predetermined plane, and a light detecting element having a light detecting portion to detect the lights dispersed by the spectroscopic portion, the method for manufacturing the spectroscopy module comprising:
- a light detecting element disposing step of disposing the light detecting element in which a light passing hole is formed, to an intermediate substrate in which an opening portion through which the light advancing to the spectroscopic portion via the light passing hole and the lights advancing to the light detecting portion from the spectroscopic portion pass, is formed;
- an intermediate substrate disposing step of disposing the intermediate substrate onto the predetermined plane after the light detecting element disposing step;
- and
- a spectroscopic portion disposing step of disposing the spectroscopic portion into the body portion.
A spectroscopy module comprising:
- a body portion through which light is allowed to transmit;
- a spectroscopic portion that disperses a light made incident into the body portion from a side of a predetermined plane of the body portion, and reflects lights to the side of the predetermined plane;
- and
- a light detecting element disposed on the predetermined plane via an intermediate substrate, and having a light detecting portion to detect the lights dispersed by the spectroscopic portion;
- wherein an opening portion, through which the lights advancing to the light detecting portion from the spectroscopic portion pass, is formed in the intermediate substrate.
Dependencies are inferred from the claim text.