Method and device for optically scanning a sample
AssigneeOlympus Soft Imaging Solutions GmbH
InventorJürgen Tümpner
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Abstract
The invention relates to a method and a device for optically scanning a sample. The basic structure of the device comprises at least one adjustment unit and at least one scanning device. The sample is displaced in relation to the scanning device by means of the adjustment unit impinged upon by a control system, or vice versa. According to the invention, adjustment values for the mechanical compensation of play are incorporated, filed in the control system and taken into consideration during adjustment.
Claims10
Device for optically scanning a sample (1), having at least one adjustment unit (2, 3), having a drive device (2) as well as a sample table (3), and having at least one scanning device (4, 5),
- whereby a white-light source (W) is disposed underneath the sample table (3) and transilluminates the sample (1), so that the image of the sample (1) is recorded by the scanning device (4, 5) disposed above it,
- whereby furthermore the sample (1) is moved relative to the scanning device (4, 5), by means of the adjustment unit (2, 3) activated by a control system (6), or vice versa, and
- whereby individual images of the sample (1) are taken, using the scanning device (4, 5), and subsequent to this, combined to form a total image, in the control system (6),
- wherein
- correction values (K) are recorded and stored in the memory of the control system (6), and taken into consideration during the setting procedure, for equalization of mechanical insufficiencies of the adjustment unit (2, 3) and/or the scanning device (4, 5), using a mask (7) scanned in place of or in addition to the sample (1), having defined markings (9).
Method for optically scanning a sample (1), having at least one adjustment unit (2, 3) having a drive device (2) as well as a sample table (3), and having at least one scanning device (4, 5),
- whereby a white-light source (W) is disposed underneath the sample table (3) and transilluminates the sample (1), so that the image of the sample (1) is recorded by the scanning device (4, 5) disposed above it,
- after which the sample (1) is moved relative to the scanning device (4, 5) by means of the adjustment unit (2, 3) activated by a control system (6), or vice versa, and
- after which individual images of the sample (1) are taken, using the scanning device (4, 5), and subsequent to this, combined to form a total image, in the control system (6),
- wherein
- correction values (K) are recorded and stored in the memory of the control system (6), and taken into consideration during the setting procedure, for equalization of mechanical insufficiencies of the adjustment unit (2, 3) and/or the scanning device (4, 5), using a mask (7) scanned in place of or in addition to the sample (1), having defined markings (9).
Dependencies are inferred from the claim text.