Vibration isolation control system

A vibration isolation control system that is coupled to an apparatus in which a plurality of vibration excitation actuators each including a vibration excitation movable unit movable in one axial direction is arranged and that suppresses a vibration that acts on the apparatus when an object is mounted on at least one of the vibration excitation movable units moving in a predetermined axial direction and the vibration excitation movable units are moved, the vibration isolation control system comprising:

• a storage unit that stores therein a model operation parameter of a vibration excitation actuator of which the vibration excitation movable unit moves in the predetermined axial direction and vibration-excitation movable mass data obtained by adding a mass of the vibration excitation movable unit moving in the predetermined axial direction and a mass of the object;
• a computing unit that simulates ideal operations of the vibration excitation actuators by using at least the model operation parameter and the vibration-excitation movable mass data and calculates a parameter corresponding to acceleration/deceleration thrust for moving the vibration-excitation movable mass;
• a vibration isolation actuator that includes a vibration isolation driving unit fixed to the apparatus and a vibration isolation movable unit driven by the vibration isolation driving unit to move in the predetermined axial direction;
• and
• a vibration isolation controller that determines a control content of the vibration isolation driving unit based on the parameter corresponding to the acceleration/deceleration thrust calculated by the computing unit and controls an operation of the vibration isolation driving unit so that a force canceling a reaction force, which acts on the apparatus when the vibration-excitation movable mass is moved in the predetermined axial direction, acts on the apparatus by moving the vibration isolation movable unit.