Piezoelectric-ferroelectric actuator device
AssigneeTechnion Research & Development Foundation Limited
InventorsUri Kushnir, Oded Rabinovitch
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Abstract
An actuator device is disclosed. The actuator device comprises a stack of piezoelectric-ferroelectric active layers separated by surface electrodes. At least a few of the surface electrodes are independently addressable such that at least two active layers are biasable by different voltages. In an embodiment of the invention, at least a few of the voltages induce a nonlinear ferroelectric effect.
Claims23
An actuator device, comprising:
- a stack of piezoelectric-ferroelectric active layers separated by surface electrodes, wherein at least a few of said surface electrodes are independently addressable such that at least two active layers are biasable by different voltages;
- and
- a voltage source and controller being in electrical communication with said at least few surface electrodes and configured to generate said voltages, wherein said voltages induce a nonlinear ferroelectric effect on at least one of said layers.
A method, comprising applying at least two different voltages to an actuator device which comprises a stack of piezoelectric-ferroelectric active layers separated by surface electrodes, such that said at least two voltages respectively bias at least two different active layers, and induce a nonlinear ferroelectric effect on at least one of said layers.
A method, comprising applying to an actuator device voltage at sufficient amount so as to generate displacement in said actuator device, wherein said actuator device comprises a stack of piezoelectric-ferroelectric active layers separated by surface electrodes, wherein at least a few of said surface electrodes are independently addressable, and wherein said voltage is applied such as to induce a nonlinear ferroelectric effect on at least one of said layers.
Dependencies are inferred from the claim text.