Pin photodiode and manufacturing method of same
AssigneeTexas Instruments Incorporated
InventorsHiroyuki Tomomatsu, Yukihisa Hirotsugu
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AssigneeTexas Instruments Incorporated
InventorsHiroyuki Tomomatsu, Yukihisa Hirotsugu
Estimating the term…
The objective of this invention is to provide a semiconductor device containing a photodiode and having stable, high sensitivity with respect to short wavelength light near 405 nm, and a manufacturing method for said semiconductor device. PIN photodiode (100C) has the following layers formed on silicon substrate (110): p-type silicon region (112), n-type silicon layer (114), field oxide film (118), silicon oxide film (120c) that covers the surface of the active region, and silicon nitride film (122c) that covers silicon oxide film (120c). Said field oxide film (118) contains extending portions (160) extending to the interior of the active region; the side portions of extending portions (160) are connected to silicon oxide film (120c), and the exposed surface portions of extending portions (160) become regions for hydrogen diffusion.
A semiconductor device characterized by the following facts:
A semiconductor device characterized by the following facts:
Dependencies are inferred from the claim text.