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US 8,138,501 B2Granted
Switching element and manufacturing method thereof
AssigneeNEC Corporation
InventorsSatoru Toguchi, Masahiko Ishida, Hiroyuki Endoh
Life of this patent
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Abstract
Disclosed is a switching element provided with a gate dielectric film and an active layer disposed in contact with the gate dielectric film. The active layer includes carbon nanotubes, and the gate dielectric film includes non-conjugated polymer containing an aromatic ring in a side chain.
Claims22
A switching element comprising:
- a gate dielectric film;
- and
- an active layer disposed in contact with said gate dielectric film,
- wherein said active layer includes carbon nanotubes, and
- wherein said gate dielectric film includes non-conjugated polymer containing an aromatic ring in a side chain,
- wherein said non-conjugated polymer is copolymer of at least one type of repeated units A having an aromatic ring in a side chain and at least one type of repeated units B having no side chain including an aromatic ring, and
- wherein said repeated units A are contained five times or more as much as said repeated units B in mole ratio.
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A switching element comprising:
- a gate dielectric film;
- and
- an active layer disposed in contact with said gate dielectric film,
- wherein said active layer includes carbon nanotubes, and
- wherein said gate dielectric film includes non-conjugated polymer containing an aromatic ring in a side chain,
- wherein said non-conjugated polymer includes substituted polyethylene skeletons represented by the following as repeated units:
- where X represents a linking group or a single bond, Ar represents an aromatic group having the aromatic ring and n represents a positive integer.
4 more elements
A method of manufacturing a switching element, comprising:
- forming a gate dielectric film;
- and
- forming an active layer so as to be in contact with the gate dielectric film,
- wherein said gate dielectric film contains non-conjugated polymer having a aromatic ring in the side chain, and
- wherein said active layer contains carbon nanotubes,
- wherein said non-conjugated polymer is copolymer of at least one type of repeated units A having an aromatic ring in a side chain and at least one type of repeated units B having no side chain including an aromatic, ring, and
- wherein said repeated units A are contained five times or more as much as said repeated units B in mole ratio.
4 more elements
Dependencies are inferred from the claim text.