Back to results
US 8,138,495 B2Granted
Film stress management for MEMS through selective relaxation
AssigneeAlcatel Lucent
InventorGeorge Patrick Watson
Life of this patent
Estimating the term…
Abstract
An apparatus comprising a microelectromechanical system. The microelectromechanical system includes a crystalline structural element having dislocations therein. For at least about 60 percent of adjacent pairs of the dislocations, direction vectors of the dislocations form acute angles of less than about 45 degrees.
Claims10
A device, comprising:
- A microelectromechanical system including:
- A crystalline structural layer having dislocations therein, wherein for at least about 60 percent of adjacent pairs of said dislocations, direction vectors of said adjacent pairs form acute angles of less than about 45 degrees, said crystalline structural layer having a suspended portion whose major or minor surface is bent.
Dependencies are inferred from the claim text.