Mass spectrometry unit

A mass spectrometry unit including a mass spectrometry section that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured, the mass spectrometry unit further including:

• a control section for preliminary storing a record of mass-to-charge ratios of specific gases that decrease a function of a specific section of the mass spectrometry unit, wherein
• if an integrated value of an ion current value of any of the specific gases detected by the mass spectrometry section over a detection time during which the ion current value is being detected is not less than a corresponding predetermined value, the control section outputs a warning signal denoting a functional decrease in the specific section, and also cancels an application of a voltage to the specific section, to thereby stop a function of the specific section.

A mass spectrometry unit including a mass spectrometry section that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured, the mass spectrometry unit further including:

• a control section for preliminary storing a record of mass-to-charge ratios of specific gases, the gases being checked for a presence or absence of a deposition thereof onto a part to be repaired at repair work of the mass spectrometry unit, wherein
• if an ion current value with the mass-to-charge ratio of any of the specific gases is detected by the mass spectrometry section, the control section records at least one of information on the specific gas and information on the part to be repaired.