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US 8,138,098 B2Granted
Method of patterning stacked structure
AssigneeIndustrial Technology Research Institute
InventorsChien-Hsien Yu, Jia-Chong Ho, Yi-Kai Wang, Ya-Lang Chen
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Abstract
A stacked structure including a soluble organic semiconductor material and a water soluble photosensitive material is provided. The water soluble photosensitive material is disposed on the surface of the soluble organic semiconductor material.
Claims5
A patterning method, comprising:
- forming a soluble organic semiconductor material;
- forming a water soluble photosensitive material directly on the soluble organic semiconductor material;
- patterning the water soluble photosensitive material;
- and
- performing a wet etching process with the patterned water soluble photosensitive material layer as an etching mask, so as to pattern the soluble organic semiconductor material, wherein an etchant of the wet etching process is a nonpolar solvent,
- wherein the soluble organic semiconductor material comprises a soluble polymer semiconductor material or a soluble small molecular semiconductor material,
- wherein the soluble polymer semiconductor material is one selected from a group consisting of polyhexylthiophene, poly(3-hexylthiophene), poly(dioctylfluorene-co-benzothiadiazole), polyacetylene, polyprrole, polyaniline and a combination thereof, or derivatives thereof, and
- wherein the soluble small molecular semiconductor material comprises a pentacene derivative expressed by one of following chemical formulae:
5 more elements
Dependencies are inferred from the claim text.