Production of an improved color filter on a microelectronic imaging device comprising a cavity
AssigneeSTMicroelectronics S.r.l.
InventorsNicolas Hotellier, Cyril Fellous, Christophe Cowache, Yannick Sanchez
Life of this patent
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Abstract
A microelectronic device includes a color filter equipped with a plurality of filtering elements, including several filtering elements. The device includes at least one first zone located inside a cavity and includes a first group of filtering elements having a first critical dimension, and at least one second zone at the periphery of the cavity, including a second group of filtering elements having a second critical dimension that is different from the first critical dimension.
Claims15
A microelectronic device with a multilayer color filter, the microelectronic device comprising:
- a plurality of filtering elements including
- a plurality of first type filtering elements comprising a first material filtering a first range of wavelengths from a visible light spectrum,
- a plurality of second type filtering elements comprising a second material filtering a second range of wavelengths from the visible light spectrum, and
- a plurality of third type filtering elements comprising a third material filtering a third range of wavelengths from the visible light spectrum;
- at least one first group of the filtering elements being inside a cavity and at a first level, and having a first critical dimension belonging to a first range;
- at least one second group of the filtering elements being outside the cavity and at a second level above the first level and having a second critical dimension belonging to a second range.
A microelectronic device with a multilayer color filter, the microelectronic device comprising:
- a plurality of filtering elements including
- a plurality of first type filtering elements comprising a first material filtering a first range of wavelengths from a visible light spectrum,
- a plurality of second type filtering elements comprising a second material filtering a second range of wavelengths from the visible light spectrum, and
- a plurality of third type filtering elements comprising a third material filtering a third range of wavelengths from the visible light spectrum;
- at least one first group of the filtering elements being inside a cavity and at a first level, and having a first dimension characteristic value;
- at least one second group of the filtering elements being outside the cavity and at a second level above the first level and having a second dimension characteristic value.
Dependencies are inferred from the claim text.