Radiation-detecting device and method of manufacturing same
AssigneeCanon Kabushiki Kaisha
InventorsTatsuya Saito, Ryoko Horie, Nobuhiro Yasui, Toru Den
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AssigneeCanon Kabushiki Kaisha
InventorsTatsuya Saito, Ryoko Horie, Nobuhiro Yasui, Toru Den
Estimating the term…
A method of manufacturing a radiation-detecting device including spaced first columnar scintillators, second columnar scintillators which are located between the neighboring first columnar scintillators and which are spaced from the first columnar scintillators, and photodetecting elements overlapping with the first columnar scintillators includes a step of preparing the substrate such that the substrate has a surface having an uneven section having protruding portions and a plurality of spaced flat sections surrounded by the uneven section and also includes a step of forming the first columnar scintillators and the second columnar scintillators on the flat sections and the protruding portions, respectively, by depositing a scintillator material on the substrate having the uneven section and the flat sections. The uneven section has recessed portions and satisfies the following inequality: h/d≧1 where h is the depth of each recessed portion and d is the distance between the protruding portions.
A method of manufacturing a radiation-detecting device that includes a substrate including a plurality of first columnar scintillators spaced from each other and a plurality of second columnar scintillators which are located between the neighboring first columnar scintillators and which are spaced from the first columnar scintillators adjacent thereto and also includes a plurality of photodetecting elements each located at a position overlapping with a corresponding one of the first columnar scintillators, the method comprising:
A radiation-detecting device comprising:
A method of manufacturing a radiation-detecting device comprising:
Dependencies are inferred from the claim text.