Method of fabricating thin film solar cell and apparatus for fabricating thin film solar cell
AssigneesSamsung SDI Co., Ltd., Samsung Electronics Co., Ltd.
InventorDonggi Ahn
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Abstract
Disclosed is a method of fabricating a thin film solar cell including introducing a reaction solution into a reaction chamber, fixing a supporter onto a loader, disposing the loader in the reaction chamber to immerse the supporter into the reaction solution, and heating the supporter and coating a buffer layer. In addition, an apparatus of fabricating a thin film solar cell including a reaction chamber mounted with an inlet of a reaction solution and an outlet of waste water, and a loader disposed in the reaction chamber and being capable of moving up and down, is disclosed.
Claims12
A method of fabricating a thin film solar cell comprising:
- introducing a reaction solution into a reaction chamber, wherein the reaction solution comprises a metal source material;
- fixing a supporter to a loader by vacuum, wherein the supporter is a substrate or an electrode;
- disposing a light absorbing layer on a surface of the supporter;
- disposing the loader in the reaction chamber to immerse the supporter with the light absorbing layer into the reaction solution;
- and then
- heating the supporter to form a buffer layer on the light absorbing layer, wherein heating is carried out by electric heating or lamp heating the loader.
Dependencies are inferred from the claim text.