Method for fabricating an image sensor
AssigneeUnited Microelectronics Corp.
InventorsHsin-Ting Tsai, Cheng-Hung Yu
Life of this patent
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Abstract
A method for fabricating an image sensor is disclosed. First, a semiconductor substrate is provided, in which a photosensitive region is defined on the semiconductor substrate. At least one photosensitive material is then formed on the semiconductor substrate, and a first exposure process is performed to form a tapered pattern in the photosensitive material. A second exposure process is performed to form a straight foot pattern in the photosensitive material, and a developing process is performed to remove the tapered pattern and straight foot pattern to form the photosensitive material into a plurality of photosensitive blocks. A reflow process is conducted thereafter to form the photosensitive blocks into a plurality of microlenses.
Claims7
A method for fabricating an image sensor, comprising:
- providing a semiconductor substrate having a photosensitive region defined thereon;
- forming at least one photosensitive material on the semiconductor substrate;
- performing a first exposure process for forming a tapered pattern and a first exposure depth in the photosensitive material, wherein the first exposure depth is less than an entire thickness of the photosensitive material using a photomask and defocussed light;
- performing a second exposure process for forming a straight foot pattern and a second exposure depth in the photosensitive material using the photomask after performing the first exposure process for forming the tapered pattern, wherein the wavelength of the first exposure process is greater than or equal to the wavelength of the second exposure;
- and the first exposure depth is less than the second exposure depth;
- performing a developing process after two sequential exposure processes to form the photosensitive material into a plurality of photosensitive blocks;
- and
- performing a reflow process to form the photosensitive blocks into a plurality of microlenses.
A method for fabricating an image sensor, comprising:
- providing a semiconductor substrate having a photosensitive region defined thereon;
- forming at least one photosensitive material on the semiconductor substrate;
- performing a first exposure process for forming a tapered pattern and a first exposure depth in the photosensitive material, wherein the first exposure depth is less than an entire thickness of the photosensitive material, and the first exposure process comprises using a same photomask and wavelength to perform a plurality of sub-exposure processes for forming a plurality of gradient tapered portions in the photosensitive material by defocus method;
- performing a second exposure process with the same photomask for forming a straight foot pattern and a second exposure depth in the photosensitive material, wherein the first exposure depth is less than the second exposure depth;
- performing a developing process after two sequential exposure processes to form the photosensitive material into a plurality of photosensitive blocks;
- and
- performing a reflow process to form the photosensitive blocks into a plurality of microlenses.
Dependencies are inferred from the claim text.