Zinc oxide thin film, transparent conductive film and display device using the same
AssigneeHitachi, Ltd.
InventorsYasuo Imanishi, Etsuko Nishimura
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Abstract
A zinc oxide thin film having desired crystallinity is fabricated. The present invention provides a zinc oxide thin film which laminated on a substrate, and which is a crystalline thin film of a wurtzite form. The c-axis of the crystalline thin film is oriented in a direction substantially perpendicular to the substrate. A zinc surface of being one polar surface of the crystalline thin film in the c-axis direction is formed in the uppermost layer. In addition, the invention also provides a zinc oxide thin film which is laminated on a substrate, and which is a crystalline thin film of a wurtzite form. The zinc oxide thin film is formed on a metal thin film layer by a thin film fabricating technique.
Claims7
A zinc oxide thin film laminated on a substrate, comprising:
- a first metal thin film layer on which the zinc oxide thin film is formed by a thin film fabricating technique,
- wherein the zinc oxide thin film is a crystalline thin film of a wurtzite form, and
- a second metal thin film layer different from the zinc oxide thin film laminated directly on the crystalline thin film,
- wherein the second metal thin film layer is metal zinc.
A zinc oxide thin film laminated on an amorphous substrate comprising:
- a metal thin film layer, which is formed on the amorphous substrate;
- a zinc oxide thin film, which is formed on the metal thin film layer;
- and
- a second metal thin film layer, which is formed on the zinc oxide thin film, wherein the second metal thin film layer is different from the zinc oxide thin film,
- wherein the zinc oxide thin film is a crystalline thin film of a wurtzite form, the c-axis of the zinc oxide thin film is oriented in a direction substantially perpendicular to the amorphous substrate, a zinc surface is formed in an uppermost layer of the zinc oxide thin film, and the zinc surface is a polar surface of the zinc oxide thin film in the c-axis direction.
Dependencies are inferred from the claim text.