Magnetic shunts in tubular targets
AssigneeW.C. Heraeus GmbH
InventorsHans-Joachim Pavel, Josef Heindel
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Abstract
A sputter target has a carrier body and a target material arranged on the carrier body, wherein the carrier body has a rear surface facing away from the target material and the target material has a front surface facing away from the carrier body. A ferromagnetic material is arranged between the front surface and the rear surface.
Claims8
A sputter target comprising a carrier body, a non-ferromagnetic target material arranged on the carrier body, the carrier body having a rear surface facing away from the target material and the target material having a front surface facing away from the carrier body, and a ferromagnetic material arranged between the front surface and the rear surface, wherein the ferromagnetic material has a thickness that changes continuously and steadily along the greatest length of the carrier body.
Dependencies are inferred from the claim text.