Dual zone gas injection nozzle

An apparatus for processing a substrate, comprising:

• a chamber body defining a process volume;
• an injection nozzle assembly at least partially disposed in the process volume, wherein the injection nozzle assembly comprises:
• a nozzle at least partially disposed in the process volume, wherein the nozzle has a substantially cylindrical body, a first plurality of injection ports formed through a bottom of the cylindrical body, and a second plurality of injection ports formed through a sidewall of the cylindrical body, wherein the first and second plurality of injection ports are open to the process volume;
• a feed plate, wherein the feed plate has a first channel and a second channel formed therein, the first channel is connected to the first inlet and the second channel is connected to the second inlet, and the nozzle coupled to the feed plate such that the first channel is in fluid communication with the first plurality of injection ports and the second channel is in fluid communication with the second plurality of injection ports;
• a first fluid path including a first inlet configured to receive a fluid input, and the first plurality of injection ports connected with the first inlet, wherein the first plurality of injection ports are configured to direct a fluid from the first inlet towards a first region of the process volume;
• and
• a second fluid path including a second inlet configured to receive a fluid input, and the second plurality of injection ports connected with the second inlet, wherein the second plurality of injection ports are configured to direct a fluid from the second inlet towards a second region of the process volume.

An apparatus for processing a substrate, comprising:

• a chamber body defining a process volume;
• an injection nozzle assembly at least partially disposed in the process volume, wherein the injection nozzle assembly comprises a nozzle at least partially disposed in the process volume, wherein the nozzle has a substantially cylindrical body, a first plurality of injection ports formed through a bottom of the cylindrical body, and a second plurality of injection ports formed through a sidewall of the cylindrical body, the sidewall of the cylindrical body perpendicular to the bottom of the cylindrical body, wherein the first and second plurality of injection ports are open to the process volume, and the injection nozzle assembly has:
• a first fluid path including a first inlet configured to receive a fluid input, and the first plurality of injection ports connected with the first inlet, wherein the first plurality of injection ports are configured to direct a fluid from the first inlet towards a first region of the process volume, and
• a second fluid path including a second inlet configured to receive a fluid input, and the second plurality of injection ports connected with the second inlet, wherein the second plurality of injection ports are configured to direct a fluid from the second inlet towards a second region of the process volume;
• and
• wherein the chamber body comprises a chamber lid having an aperture formed near a center of the lid, and the nozzle is partially disposed in the processing volume through the aperture.